DENKI KAGAKU KOGYO KABUSHIKI KAISHA Electronic Materials Division

Boron nitride has excellent insulation characteristics, high thermal conductivity, chemical stability, and mechanical workability, being used as semiconductor process members, electric furnace members and electronic components assembling jigs, etc.

This material has a hexagonal crystalline structure, and is also known as “white carbon.” Since it has somewhat peculiar characteristics such as insulating properties at high temperatures, high thermal conductivity and low thermal expansion, etc., it is suitable as a material for use under strict environments such as in the semiconductor process, etc.

- Various types of components for semiconductor manufacturing equipment
- Metal/glass demolding/corrosion resistant material
- Electronic components assembling jigs
- Electric furnace insulation members
- Boron (B) dopant added to silicon (Si)