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DENKA Electron & Ion Emitters |
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DENKA(LaB6)Cathode, DENKA TFE, DENKA L-MION |
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2005/08/31 update |
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| Outline |
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"LaB6 Cathode" and "TFE" are used as electronic sources in electron microscopes (SEM, TEM) that are indispensable for nanotechnology, furthering addition to which, there is increasing demand for them as materials for semiconductor manufacturing/inspection equipment as well. Also, room temperature operating type Ga ion source "L-MION" is used as the ion source for focused ion beam (FIB) equipment. |
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| Features |
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"LaB6 Cathode," which is processed to high precision by using high quality LaB6 monocrystals, offers higher luminosity and a longer life than tungsten filaments. Also, "TFE," which undergoes high precision chip processing, offers even higher luminosity and longer life. The Ga ion source "L-MION" realizes stable ion radiation through its special chip treatment.
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| Use |
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(1) Electron source for electron microscopes (SEM, TEM)
(2) Electron source for semiconductor inspection equipment (DR-SEM, CD-SEM WI-SEM) (EB exposure equipment)
(3) Ion source for focused ion beam (FIB) equipment
(4) Electron source for plasma generation equipment
(5) Electron source for ion plating
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| More Information |
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DENKA LaB6 Cathode [PDF]
DENKA TFE [PDF]
DENKA L-MION [PDF]
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| Contact Us |
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| Department |
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Electronic Products Department |
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| TEL |
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+81-3-5290-5542 |
| FAX |
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+81-3-5290-5289 |
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Inquiry Click Here |
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The information contained on this website is presented for the purpose of generally advising potential customers of DENKI KAGAKU KOUGYO KABUSHIKI KAISYA (hereinafter, "DENKA") about the basic description, properties and characteristics of various DENKA products (hereinafter, "Product Information"). DENKA makes no warranty or representation as to the entire accuracy or completeness of the Product Information on this website. |
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Nothing on this website will be deemed to create any express or implied warranty or obligation of DENKA with respect to the Product Information or its use, including, but not limited to, any warranty of merchantability, fitness for a particular purpose or infringement of any intellectual property rights. |
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Each user of Product Information and DENKA products assumes its own responsibility to properly determine the manner and suitability of use of Product Information and DENKA products in its own operations. The user should exercise proper care in considering Material Safety Data Sheet, Product Information and any other technical information provided by DENKA, including descriptions of use conditions, warnings and cautionary instructions. |
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DENKA reserves the right to change Product Information from time to time at its discretion and without notice. |
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